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The Intistute of Micro- and Nanostructure Research together with CENEM own two transmission electron microscopes (TEM) with various TEM specimen holders, a scanning electron microscope / focused ion beam SEM/FIB Dualbeam System and a broadly equipped sample preparation laboratory. With the expertise of the staff and this equipment high-end research can be performed in the huge field of electron microscopy. Detailed information about the various TEMs, their accessories, the sample preparation as well as the FIB can be found below.

Transmission Electron Microscopes

FEI Titan Themis 300

The Titan Themis3 300 is our high-end TEM providing high-resolution imaging as well as high performance analytical investigation capabilities. This double-aberration-corrected TEM corrects both the image and the probe forming system enabling high-resolution imaging in TEM as well as scanning TEM (STEM) mode resulting in resolution limits below 1 Å for both modes for all high tensions between 60 kV and 300 kV. The high brightness electron gun (X-FEG) equipped with a monochromator to improve the energy resolution in combination with a high-sensitivity SDD X-ray spectrometer (Super-X) and a high-resolution post-column energy filter (GIF Quantum) creates a high performance analytical instrument perfectly suited for the nanoanalytical characterization of all kinds of materials and devices. Energy filtered TEM (EFTEM) imaging, high-resolution electron energy-loss spectroscopy (EELS) as well as energy-dispersive X-ray spectroscopy (EDXS) yield chemical, elemental as well as bonding information even down to the atomic scale. Additionally information about local band gaps and plasmonics are gained by monochromated low-loss EELS investigations. Furthermore the Titan Themis3 300 is used to perform advanced in situ experiments using special TEM specimen holders. A further advanced method available at the Titan Themis3 300 is electron tomography enabling the analytical characterization of materials and devices in 3 dimensions. This high-end analytical TEM is used to answer the most complex questions regarding materials science.
Manufacturer: FEI
Model: Titan Themis 300
Construction Year: 2014
Location: Erlangen
URL: https://www.em.tf.fau.de/research/equipment/fei-titan-themis-300/
Funding source: DFG / Exzellenzcluster (EXC)

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SEM/FIB Dualbeam System

FEI Helios NanoLab 660

The FEI Helios NanoLab 660 dualbeam System combines ultra-high resolution SEM imaging with extremely precise FIB milling. Having 8 different detectors, the instrument is capable of resolving a large variety of signals like secondary electrons, x-rays, and secondary ions. Using the Ga-ion FIB material can be removed with nanometer precision to prepare site-specific cross-sections, TEM lamellae or structures for mechanical tests. Three different gas injection systems are available that can be used for different purposes. Carbon and Platinum can be deposited in order to protect a surface or to do circuit editing, while XeF2 can be used for ion-less milling of certain materials. In addition Two micro-manipulators are available for lift-out procedures, sample transfers and mechanical or electrical probing.

Manufacturer: FEI
Model: Helios NanoLab660
Construction Year: 2013
Location: Erlangen
URL: https://www.em.tf.fau.de/research/equipment/helios-nanolab-660/
Funding source: DFG / Exzellenzcluster (EXC)

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X-ray Microscopy Facility

Zeiss Xradia 810 Ultra

Our Xradia Ultra is a high-end x-ray microscope (XRM) providing high-resolution imaging up to 50 nm as well as large field of view stacks made for 3 dimensional reconstructions. With advanced optics firstly established for synchrotron experiments, we obtain with this XRM equal resolutions for our laboratory. The rotating chromium anode source offers a quasi-monochromatic 5.4 keV x-ray beam due to condenser and Fresnel zone plate lens system. Common absorption imaging yield material mass contrast of small slices up to bulk specimen. In addition, the Xradia Ultra includes Zernike phase contrast visualization for porous or small mass-bandwidth samples as organic materials by edge enhancement. Furthermore, mechanic in situ experiments are enabled by a customized mounting stage for pressure, shear and strain stress. The high-end XRM closes the visualisation gap between Light and Electron Microscopy in a non-destructive way.

Manufacturer: Zeiss Carl Microscopy GmbH
Model: 3D-Röntgenmikroskop XRadia Ultra 810
Construction Year: 2017
Location: Erlangen
URL: https://www.em.tf.fau.de/research/equipment/zeiss-xradia-810-ultra/
Funding source: Deutsche Forschungsgemeinschaft (DFG)

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